2006. Vol. 4. Issue 1, Pp. 288–305
URL: https://multiphasesystems.online/uim2006.1.025,en
DOI: https://doi.org/10.21662/uim2006.1.025
URL: https://multiphasesystems.online/uim2006.1.025,en
DOI: https://doi.org/10.21662/uim2006.1.025
Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation
Migranov A.B.
Institute of Mechanics, Ufa
Abstract
The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.
Citation
Migranov A.B. Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation Proceedings of the Institute of Mechanics of Ufa Branch of RAS. 4 (2006). 288–305.
Keywords
MEMS,
microbot parts,
special software,
specialized virtual system